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For instance, The existing concave OC could get replaced by a aircraft mirror which could mitigate the power density over the floor of M1 and also the diamond. What's more, working with substantial harm threshold coatings for M1 and diamond would also Increase the output electrical power with none damages. Then, the NIR laser with the 2nd Stokes wavelength could be substantial ample, along with its superior beam good quality, to generate the ultimate DUV laser at 193 nm with a significant typical energy.
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Both the 1040 nm and 1078 nm laser originate from one particular dual-wavelength Yb-doped fiber laser. Each individual laser is amplified by phases of fiber amplifier and Yb-doped components amplifier, respectively.
On the other side, the facility scaling on the NIR laser is an additional facet to boost the common power with the 193-nm DUV laser. Due to lack of the higher-electrical power amplification Alternative in the NIR laser (one example is at 1553 nm), nonlinear frequency processes which include optical parameter oscillation (OPO) could possibly be placed on create a wavelength converter by shifting the wavelength from 1 μm to the desired wavelength as well as acquiring relative greater electric power [21]. Not too long ago, a diamond Raman laser showed its means in acquiring a substantial ability and also a high conversion effectiveness at the 1st Stokes of your one-μm laser [22,23], which means the possibility to get click here used in the 193-nm DUV laser technology as a consequence of its superior Raman attain and huge frequency shift.
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During the scientific and industrial purposes, the beam quality in the DUV laser can be a significant parameter. Specially, the beam high-quality of your DUV laser dramatically affects the laser machining outcomes. The beam high quality of your DUV laser is decided by that of the elemental laser plus the crystal for that frequency conversion. Not long ago, a substantial-electricity DUV laser (>10 W) at 258 nm was noted having a beam high quality of M2 < one.five, which was produced by FHG of a Yb:YAG laser at 1030 nm utilizing the CLBO crystal [thirteen]. This laser would bring about a greater laser machining result in comparison to the former DUV lasers with larger sized M2.
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Tunable ultraviolet laser supply dependant on strong-point out dye laser technology and CsLiB6O10 harmonic era
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